| 11904164 |
Nanosecond pulsed electric field system |
Kenneth R. Krieg, Chaofeng Huang |
2024-02-20 |
| 11766563 |
Nanosecond pulsed power sources having multi-core transformers |
Chaofeng Huang, Kenneth R. Krieg |
2023-09-26 |
| 11452870 |
Nanosecond pulsed power sources having multi-core transformers |
Chaofeng Huang, Kenneth R. Krieg |
2022-09-27 |
| 8395837 |
Releasing and post-releasing processes in fabrications for micromirror array devices |
Hongqin Shi, James C. Dunphy, Dmitri Simonian, John D. Porter |
2013-03-12 |
| 7655553 |
Microstructure sealing tool and methods of using the same |
— |
2010-02-02 |
| 7645704 |
Methods and apparatus of etch process control in fabrications of microstructures |
Hongqin Shi |
2010-01-12 |
| 7189332 |
Apparatus and method for detecting an endpoint in a vapor phase etch |
Satyadev Patel, Douglas B. MacDonald, Niles K. MacDonald, Hongqin Shi |
2007-03-13 |
| 7041224 |
Method for vapor phase etching of silicon |
Satyadev Patel, Douglas B. MacDonald, Hongqin Shi, Andrew Huibers, Peter Heureux |
2006-05-09 |
| 7027200 |
Etching method used in fabrications of microstructures |
Hongqin Shi, Andrew Huibers, Satyadev Patel |
2006-04-11 |
| 6949202 |
Apparatus and method for flow of process gas in an ultra-clean environment |
Satyadev Patel, Douglas B. MacDonald, Niles K. MacDonald |
2005-09-27 |
| 6942811 |
Method for achieving improved selectivity in an etching process |
Satyadev Patel, Douglas B. MacDonald, Hongqin Shi |
2005-09-13 |
| 6939472 |
Etching method in fabrications of microstructures |
Hongqin Shi |
2005-09-06 |
| 6800210 |
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants |
Satyadev Patel, Andrew Huibers, Peter Heureux |
2004-10-05 |
| 6290864 |
Fluoride gas etching of silicon with improved selectivity |
Satyadev Patel, Douglas B. MacDonald |
2001-09-18 |