Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11904164 | Nanosecond pulsed electric field system | Kenneth R. Krieg, Chaofeng Huang | 2024-02-20 |
| 11766563 | Nanosecond pulsed power sources having multi-core transformers | Chaofeng Huang, Kenneth R. Krieg | 2023-09-26 |
| 11452870 | Nanosecond pulsed power sources having multi-core transformers | Chaofeng Huang, Kenneth R. Krieg | 2022-09-27 |
| 8395837 | Releasing and post-releasing processes in fabrications for micromirror array devices | Hongqin Shi, James C. Dunphy, Dmitri Simonian, John D. Porter | 2013-03-12 |
| 7655553 | Microstructure sealing tool and methods of using the same | — | 2010-02-02 |
| 7645704 | Methods and apparatus of etch process control in fabrications of microstructures | Hongqin Shi | 2010-01-12 |
| 7189332 | Apparatus and method for detecting an endpoint in a vapor phase etch | Satyadev Patel, Douglas B. MacDonald, Niles K. MacDonald, Hongqin Shi | 2007-03-13 |
| 7041224 | Method for vapor phase etching of silicon | Satyadev Patel, Douglas B. MacDonald, Hongqin Shi, Andrew Huibers, Peter Heureux | 2006-05-09 |
| 7027200 | Etching method used in fabrications of microstructures | Hongqin Shi, Andrew Huibers, Satyadev Patel | 2006-04-11 |
| 6949202 | Apparatus and method for flow of process gas in an ultra-clean environment | Satyadev Patel, Douglas B. MacDonald, Niles K. MacDonald | 2005-09-27 |
| 6942811 | Method for achieving improved selectivity in an etching process | Satyadev Patel, Douglas B. MacDonald, Hongqin Shi | 2005-09-13 |
| 6939472 | Etching method in fabrications of microstructures | Hongqin Shi | 2005-09-06 |
| 6800210 | Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants | Satyadev Patel, Andrew Huibers, Peter Heureux | 2004-10-05 |
| 6290864 | Fluoride gas etching of silicon with improved selectivity | Satyadev Patel, Douglas B. MacDonald | 2001-09-18 |