Issued Patents All Time
Showing 25 most recent of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9261696 | Micromirror array assembly | Andrew Huibers, Peter W. Richards, Terry Tarn, Dietrich Dehlinger | 2016-02-16 |
| 8693082 | Micromirror array assembly with in-array pillars | Andrew Huibers, Peter W. Richards, Terry Tarn, Dietrich Dehlinger | 2014-04-08 |
| 7866036 | Method of fabricating micromirror device | Jonathan Doan, Robert M. Duboc, Jr. | 2011-01-11 |
| 7787170 | Micromirror array assembly with in-array pillars | Andrew Huibers, Peter W. Richards, Terry Tarn, Dietrich Dehlinger | 2010-08-31 |
| 7751114 | System and apparatus for repairing micromirrors in spatial light modulators | James C. Dunphy, Peter W. Richards, Michel Combes | 2010-07-06 |
| 7697193 | Micromirror and post arrangements on substrates | Andrew Huibers | 2010-04-13 |
| 7671428 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2010-03-02 |
| 7655492 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2010-02-02 |
| 7629190 | Method for making a micromechanical device by using a sacrificial substrate | Andrew Huibers | 2009-12-08 |
| 7630085 | Interferometers of high resolutions | Regis Grasser, Andrew Huibers | 2009-12-08 |
| 7586668 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2009-09-08 |
| 7573111 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2009-08-11 |
| 7557932 | Characterization of micromirror array devices using interferometers | Jonathan Doan, Regis Grasser, Andrew Huibers, Igor Volfman | 2009-07-07 |
| 7514012 | Pre-oxidization of deformable elements of microstructures | Jonathan Doan, Dmitri Simonian | 2009-04-07 |
| 7498648 | Mirror-based projection system with a programmable control unit for controlling a spatial light modulator | Peter W. Richards, Andrew Huibers | 2009-03-03 |
| 7483198 | Micromirror device and method for making the same | Jonathan Doan, Andrew Huibers, James C. Dunphy, Dmitri Simonian, Hongqin Shi +1 more | 2009-01-27 |
| 7483126 | Performance analyses of micromirror devices | Igor Volfman, Andrew Huibers, Peter W. Richards, Leonid Frenkel, Jim Dunphy +2 more | 2009-01-27 |
| 7459333 | Method for making a micromirror-based projection system with a programmable control unit for controlling a spatial light modulator | Peter W. Richards, Andrew Huibers | 2008-12-02 |
| 7459402 | Protection layers in micromirror array devices | Jonathan Doan, Peter Heureux | 2008-12-02 |
| 7449358 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2008-11-11 |
| 7436572 | Micromirrors and hinge structures for micromirror arrays in projection displays | Andrew Huibers | 2008-10-14 |
| 7436573 | Electrical connections in microelectromechanical devices | Jonathan Doan, Robert M. Duboc, Jr. | 2008-10-14 |
| 7422920 | Method and forming a micromirror array device with a small pitch size | Andrew Huibers | 2008-09-09 |
| 7411717 | Micromirror device | Andrew Huibers | 2008-08-12 |
| 7405860 | Spatial light modulators with light blocking/absorbing areas | Andrew Huibers | 2008-07-29 |