| 7394140 |
Micromirror array device with electrostatically deflectable mirror plates |
Andrew Huibers, Chris Spindt, Peter Heureux |
2008-07-01 |
$12,764,000 |
| 7375873 |
Method of repairing micromirrors in spatial light modulators |
James C. Dunphy, Peter W. Richards, Michel Combes |
2008-05-20 |
$11,789,000 |
| 7362494 |
Micromirror devices and methods of making the same |
Andrew Huibers, Hongqin Shi, James C. Dunphy |
2008-04-22 |
$7,957,000 |
| 7362493 |
Micromirror and post arrangements on substrates |
Andrew Huibers |
2008-04-22 |
$7,957,000 |
| 7312915 |
Microelectromechanical devices with low inertia movable elements |
Jianglong Zhang |
2007-12-25 |
|
| 7295363 |
Optical coating on light transmissive substrates of micromirror devices |
Peter Heureux, Jonathan Doan, Regis Grasser |
2007-11-13 |
$12,677,000 |
| 7286278 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
Andrew Huibers, Steve S. Chiang |
2007-10-23 |
$22,794,000 |
| 7268934 |
Micromirror and post arrangements on substrates |
Andrew Huibers |
2007-09-11 |
$11,319,000 |
| 7215458 |
Deflection mechanisms in micromirror devices |
Peter W. Richards, Andrew Huibers, Michel Combes |
2007-05-08 |
$21,644,000 |
| 7215459 |
Micromirror devices with in-plane deformable hinge |
Andrew Huibers, Jonathan Doan, James C. Dunphy, Dmitri Simonian, Hongqin Shi +1 more |
2007-05-08 |
|
| 7198982 |
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
Andrew Huibers, Steve S. Chiang |
2007-04-03 |
$7,574,000 |
| 7189332 |
Apparatus and method for detecting an endpoint in a vapor phase etch |
Gregory P. Schaadt, Douglas B. MacDonald, Niles K. MacDonald, Hongqin Shi |
2007-03-13 |
$13,003,000 |
| 7158279 |
Spatial light modulators with non-uniform pixels |
Regis Grasser, Andrew Huibers, Peter Heureux |
2007-01-02 |
|
| 7153443 |
Microelectromechanical structure and a method for making the same |
Jonathan Doan |
2006-12-26 |
$9,254,000 |
| 7138693 |
Barrier layers for microelectromechanical systems |
Jonathan Doan, Andrew Huibers |
2006-11-21 |
|
| 7119944 |
Micromirror device and method for making the same |
Andrew Huibers, Jonathan Doan, James C. Dunphy, Dmitri Simonian, Hongqin Shi +1 more |
2006-10-10 |
|
| 7113322 |
Micromirror having offset addressing electrode |
— |
2006-09-26 |
|
| 7110160 |
Electrical contacts in microelectromechanical devices with multiple substrates |
Peter Richards, Jonathan Doan, Terry Tarn |
2006-09-19 |
|
| 7099065 |
Micromirrors with OFF-angle electrodes and stops |
Andrew Huibers, Christopher J. Spindt, Peter Heureux |
2006-08-29 |
|
| 7085035 |
Display apparatus with improved contrast ratio |
Andrew Huibers, Peter Heureux, Robert M. Duboc, Jr., Regis Grasser |
2006-08-01 |
|
| 7075702 |
Micromirror and post arrangements on substrates |
Andrew Huibers |
2006-07-11 |
|
| 7041224 |
Method for vapor phase etching of silicon |
Gregory P. Schaadt, Douglas B. MacDonald, Hongqin Shi, Andrew Huibers, Peter Heureux |
2006-05-09 |
|
| 7042622 |
Micromirror and post arrangements on substrates |
Andrew Huibers |
2006-05-09 |
|
| 7042623 |
Light blocking layers in MEMS packages |
Andrew Huibers, Terry Tarn |
2006-05-09 |
|
| 7027200 |
Etching method used in fabrications of microstructures |
Hongqin Shi, Gregory P. Schaadt, Andrew Huibers |
2006-04-11 |
|