Issued Patents All Time
Showing 26–50 of 81 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7394140 | Micromirror array device with electrostatically deflectable mirror plates | Andrew Huibers, Chris Spindt, Peter Heureux | 2008-07-01 |
| 7375873 | Method of repairing micromirrors in spatial light modulators | James C. Dunphy, Peter W. Richards, Michel Combes | 2008-05-20 |
| 7362494 | Micromirror devices and methods of making the same | Andrew Huibers, Hongqin Shi, James C. Dunphy | 2008-04-22 |
| 7362493 | Micromirror and post arrangements on substrates | Andrew Huibers | 2008-04-22 |
| 7312915 | Microelectromechanical devices with low inertia movable elements | Jianglong Zhang | 2007-12-25 |
| 7295363 | Optical coating on light transmissive substrates of micromirror devices | Peter Heureux, Jonathan Doan, Regis Grasser | 2007-11-13 |
| 7286278 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2007-10-23 |
| 7268934 | Micromirror and post arrangements on substrates | Andrew Huibers | 2007-09-11 |
| 7215458 | Deflection mechanisms in micromirror devices | Peter W. Richards, Andrew Huibers, Michel Combes | 2007-05-08 |
| 7215459 | Micromirror devices with in-plane deformable hinge | Andrew Huibers, Jonathan Doan, James C. Dunphy, Dmitri Simonian, Hongqin Shi +1 more | 2007-05-08 |
| 7198982 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates | Andrew Huibers, Steve S. Chiang | 2007-04-03 |
| 7189332 | Apparatus and method for detecting an endpoint in a vapor phase etch | Gregory P. Schaadt, Douglas B. MacDonald, Niles K. MacDonald, Hongqin Shi | 2007-03-13 |
| 7158279 | Spatial light modulators with non-uniform pixels | Regis Grasser, Andrew Huibers, Peter Heureux | 2007-01-02 |
| 7153443 | Microelectromechanical structure and a method for making the same | Jonathan Doan | 2006-12-26 |
| 7138693 | Barrier layers for microelectromechanical systems | Jonathan Doan, Andrew Huibers | 2006-11-21 |
| 7119944 | Micromirror device and method for making the same | Andrew Huibers, Jonathan Doan, James C. Dunphy, Dmitri Simonian, Hongqin Shi +1 more | 2006-10-10 |
| 7113322 | Micromirror having offset addressing electrode | — | 2006-09-26 |
| 7110160 | Electrical contacts in microelectromechanical devices with multiple substrates | Peter Richards, Jonathan Doan, Terry Tarn | 2006-09-19 |
| 7099065 | Micromirrors with OFF-angle electrodes and stops | Andrew Huibers, Christopher J. Spindt, Peter Heureux | 2006-08-29 |
| 7085035 | Display apparatus with improved contrast ratio | Andrew Huibers, Peter Heureux, Robert M. Duboc, Jr., Regis Grasser | 2006-08-01 |
| 7075702 | Micromirror and post arrangements on substrates | Andrew Huibers | 2006-07-11 |
| 7041224 | Method for vapor phase etching of silicon | Gregory P. Schaadt, Douglas B. MacDonald, Hongqin Shi, Andrew Huibers, Peter Heureux | 2006-05-09 |
| 7042622 | Micromirror and post arrangements on substrates | Andrew Huibers | 2006-05-09 |
| 7042623 | Light blocking layers in MEMS packages | Andrew Huibers, Terry Tarn | 2006-05-09 |
| 7027200 | Etching method used in fabrications of microstructures | Hongqin Shi, Gregory P. Schaadt, Andrew Huibers | 2006-04-11 |