Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods and apparatus of etch process control in fabrications of microstructures

Methods and apparatus of etch process control in fabrications of microstructures

US Patent 7645704 · Granted Jan 12, 2010

Estimated economic value: $24,865,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatuses and methods for limiting load current in nanosecond pulsed power sou2025
Nanosecond pulsed power sources having multi-core transformers2025
Nanosecond pulsed electric field system2024
Systems and methods for contact immersion lithography2024
Nanosecond pulsed power sources having multi-core transformers2023
Systems and methods for contact immersion lithography2022
Nanosecond pulsed power sources having multi-core transformers2022
Systems and methods for verifying photomask cleanliness2022
Systems and methods for lithography2021
Method for fabricating a curved eyepiece2019
Method, apparatus and system for providing a uniform laminate structure2017
Lens with lightguide insert for head wearable display2017