Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136538 | Deposition chamber system diffuser with increased power efficiency | Changling Li, Lai ZHAO, Gaku Furuta, Soo Young Choi, Robin L. Tiner +1 more | 2024-11-05 |
| 9243328 | Susceptor with roll-formed surface and method for making same | Gaku Furuta, Soo Young Choi, John M. White | 2016-01-26 |