Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428722 | Compositions and methods using same for deposition of silicon-containing film | Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Dino Sinatore, Manchao Xiao | 2025-09-30 |
| 12398463 | Organic small molecule inhibitors and application method thereof in thin film deposition | Lanyun Cheng, Xueqi Zhang, Jing-Shan Hu, Sikun Zhu | 2025-08-26 |
| 12312684 | Siloxane compositions and methods for using the compositions to deposit silicon containing films | Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway | 2025-05-27 |
| 12021152 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2024-06-25 |
| 11913112 | Processes for depositing silicon-containing films using halidosilane compounds and compositions | Xinjian Lei, John Francis Lehmann, Alan Charles Cooper | 2024-02-27 |
| 11732351 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Xinjian Lei, Moo-Sung Kim | 2023-08-22 |
| 11670722 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2023-06-06 |
| 11380801 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2022-07-05 |
| 11268190 | Processes for depositing silicon-containing films using halidosilane compounds | Xinjian Lei, John Francis Lehmann, Alan Charles Cooper | 2022-03-08 |
| 11270880 | Precursors and flowable CVD methods for making low-k films to fill surface features | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2022-03-08 |
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao | 2021-10-12 |
| 11104990 | Methods for depositing a conformal metal or metalloid silicon nitride film and resultant films | Xinjian Lei, Moo-Sung Kim | 2021-08-31 |
| 11017998 | Precursors and flowable CVD methods for making low-K films to fill surface features | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2021-05-25 |
| 10985013 | Method and precursors for manufacturing 3D devices | Robert Gordon Ridgeway, Xinjian Lei, Raymond Nicholas Vrtis, Bing Han, Madhukar Bhaskara Rao | 2021-04-20 |
| 10923327 | Chamber liner | Lai ZHAO, Robin L. Tiner, Allen Lau, Gaku Furuta, Soo Young Choi | 2021-02-16 |
| 10804408 | Process to reduce plasma induced damage | Lai ZHAO, Yujia Zhai, Soo Young Choi | 2020-10-13 |
| 10748759 | Methods for improved silicon nitride passivation films | Lai ZHAO, Soo Young Choi | 2020-08-18 |
| 10468244 | Precursors and flowable CVD methods for making low-K films to fill surface features | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, Manchao Xiao, Xinjian Lei | 2019-11-05 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Ronald Martin Pearlstein, Manchao Xiao | 2019-09-24 |
| 10395920 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, William Robert Entley, Jennifer Lynn Anne Achtyl, Xinjian Lei | 2019-08-27 |
| 10354860 | Method and precursors for manufacturing 3D devices | Robert Gordon Ridgeway, Xinjian Lei, Raymond Nicholas Vrtis, Bing Han, Madhukar Bhaskara Rao | 2019-07-16 |
| 10319862 | Barrier materials for display devices | Robert Gordon Ridgeway, Andrew David Johnson, Anupama Mallikarjunan, Raymond Nicholas Vrtis, Xinjian Lei +3 more | 2019-06-11 |
| 10145008 | Compositions and methods using same for carbon doped silicon containing films | Haripin Chandra, Kirk Scott Cuthill, Anupama Mallikarjunan, Xinjian Lei, Matthew R. MacDonald +2 more | 2018-12-04 |
| 10106890 | Compositions and methods using same for deposition of silicon-containing film | John Francis Lehmann, Xinjian Lei, Raymond Nicholas Vrtis, Robert Gordon Ridgeway, William Robert Entley | 2018-10-23 |
| 9922818 | Alkyl-alkoxysilacyclic compounds | Raymond Nicholas Vrtis, Robert Gordon Ridgeway, William Robert Entley, Jennifer Lynn Anne Achtyl, Xinjian Lei | 2018-03-20 |