Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12319637 | High purity ethylenediamine for semiconductor applications | Hareesh Thridandam, Stuart Dimock, Steven Gerard Mayorga | 2025-06-03 |
| 11725111 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2023-08-15 |
| 11282710 | Selective deposition on silicon containing surfaces | — | 2022-03-22 |
| 11142658 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Jianheng Li | 2021-10-12 |
| 10991571 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill | 2021-04-27 |
| 10899500 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Richard Ho, Daniel P. Spence, Xinjian Lei | 2021-01-26 |
| 10421766 | Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Jianheng Li | 2019-09-24 |
| 10319584 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Haripin Chandra, Eugene Jospeh Karwacki, Jr., Bing Han +1 more | 2019-06-11 |
| 10279959 | Alkoxysilylamine compounds and applications thereof | Manchao Xiao, Richard Ho, Daniel P. Spence, Xinjian Lei | 2019-05-07 |
| 10242864 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill +1 more | 2019-03-26 |
| 10170297 | Compositions and methods using same for flowable oxide deposition | Daniel P. Spence | 2019-01-01 |
| 10077364 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Haripin Chandra +1 more | 2018-09-18 |
| 9809711 | Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor process | Manchao Xiao, Richard Ho, Xinjian Lei, Steven Gerard Mayorga, Daniel P. Spence | 2017-11-07 |
| 9677178 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Richard Ho | 2017-06-13 |
| 9627193 | Organoaminodisilane precursors and methods for depositing films comprising same | Steven Gerard Mayorga, Heather Regina Bowen, Xinjian Lei, Manchao Xiao, Haripin Chandra +1 more | 2017-04-18 |
| 9460912 | High temperature atomic layer deposition of silicon oxide thin films | Haripin Chandra, Meiliang Wang, Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill +1 more | 2016-10-04 |
| 9447287 | Compositions and processes for depositing carbon-doped silicon-containing films | Manchao Xiao, Xinjian Lei, Haripin Chandra, Eugene Joseph Karwacki, Jr., Bing Han +1 more | 2016-09-20 |
| 9200167 | Alkoxyaminosilane compounds and applications thereof | Daniel P. Spence, Xinjian Lei, Manchao Xiao, Richard Ho, Mark Leonard O'Neill +1 more | 2015-12-01 |
| 9005719 | Organoaminosilane precursors and methods for making and using same | Manchao Xiao, Xinjian Lei, Bing Han, Mark Leonard O'Neill, Richard Ho +2 more | 2015-04-14 |
| 8993072 | Halogenated organoaminosilane precursors and methods for depositing films comprising same | Manchao Xiao, Xinjian Lei, Mark Leonard O'Neill, Bing Han, Haripin Chandra +2 more | 2015-03-31 |
| 8821751 | Chemical mechanical planarization composition and method with low corrosiveness | Xiaobo Shi | 2014-09-02 |
| 8771807 | Organoaminosilane precursors and methods for making and using same | Manchao Xiao, Xinjian Lei, Bing Han, Mark Leonard O'Neill, Richard Ho +2 more | 2014-07-08 |
| 8590705 | Cylinder surface treated container for monochlorosilane | Philip E. Behm, Wayne Thomas McDermott, Manchao Xiao, Sai-Hong Andrew Lo, Agnes Derecskei-Kovacs | 2013-11-26 |
| 8202446 | Ionic liquid based mixtures for gas storage and delivery | Daniel Joseph Tempel, Philip Bruce Henderson, Jeffrey Richard Brzozowski, Diwakar Garg | 2012-06-19 |
| 7736420 | Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom | Wayne Thomas McDermott, Philip Bruce Henderson, Daniel Joseph Tempel, James Joseph Hart, Rosaleen Patricia Morris-Oskanian +1 more | 2010-06-15 |