Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664242 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Sang Ki Nam, Kyu-Hee Han, Young Do Kim +1 more | 2023-05-30 |
| 11545372 | Plasma generator, cleaning liquid processing apparatus, semiconductor device cleaning apparatus, cleaning liquid processing method, and method of manufacturing semiconductor device | Beom Jin Yoo, Min Hyoung Kim, Sang Ki Nam, Lu Siqing, Kyu-Hee Han | 2023-01-03 |
| 11107705 | Cleaning solution production systems and methods, and plasma reaction tanks | Beom Jin Yoo, Min Hyoung Kim, Sang Ki Nam, Kyu-Hee Han, Young Do Kim +1 more | 2021-08-31 |
| 10077523 | Method for washing utilizing quantity of laundry | Myong Hun Im, Chang Woo Son, Kwang-Hyun Kim | 2018-09-18 |
| 9564298 | Semiconductor manufacturing apparatus and semiconductor device manufacturing method using the same | Ju Hee Lee, Su Ho Lee, Jae Beom Park, Ik Soo Kim, Myoung-Woon Kim | 2017-02-07 |
| 9512550 | Method for washing | Myong Hun Im, Chang Woo Son | 2016-12-06 |
| 9347164 | Washer | Myong Hun Im, Sung Min Lee | 2016-05-24 |
| 8169148 | Plasma generating apparatus | Sang Jean Jeon, Yuri Tolmachev, Su Ho Lee, Seoung Hyun Seok, Young Min Park | 2012-05-01 |