Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song | 2022-09-06 |
| 11049754 | Method for controlling semiconductor process | Min-Joon Park, Hyo Sung Kim, Kyung-Hoon Lee, Jae Hyun Lee | 2021-06-29 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Je-Woo Han, Chan Hoon Park, Seung-Yoon Song | 2021-03-30 |