Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521866 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2022-12-06 |
| 11437264 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Je-Woo Han, Chan Hoon Park, Seul Ha Myung | 2022-09-06 |
| 11037806 | Plasma processing method, plasma processing apparatus and method of manufacturing semiconductor device using the apparatus | Chan Hoon Park, Jong-Woo Sun, Jung-Mo Sung, Je-Woo Han, Jin Young Park | 2021-06-15 |
| 10964578 | Apparatus for manufacturing semiconductor device and manufacturing method of semiconductor device | Jung-Mo Sung, Jong-Woo Sun, Je-Woo Han, Chan Hoon Park, Seul Ha Myung | 2021-03-30 |