Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249491 | Substrate treating apparatus and substrate support unit | Hyoungkyu Son, Jae Hyun Cho, Min Keun Bae, Dong Suk Kim, Hyeon Gyu Kim +3 more | 2025-03-11 |
| 12125678 | Filter unit, substrate treating apparatus including the same, and substrate treating method | Ogsen Galstyan, Hyo Seong SEONG, Byeung Geon JEON | 2024-10-22 |
| 11869749 | Substrate processing apparatus and method of manufacturing thereof | Shant ARAKELYAN, Ja Myung GU | 2024-01-09 |
| 11823874 | Substrate treating apparatus and method for controlling temperature of ferrite core | Ogsen Galstyan, Junpyo Lee, Goon Ho Park, Hyun Jin Kim, Young Bin Kim | 2023-11-21 |
| 11587770 | Apparatus and method for treating substrate | Jamyung Gu, Goon Ho Park, Taehoon Jo, Shant ARAKELYAN | 2023-02-21 |
| 11545340 | Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same | Shin-Woo Nam, Hong Won Lee, Jae Bak SHIM | 2023-01-03 |
| 11244847 | Substrate treating apparatus and substrate treating method | Harutyun Melikyan, Jamyung Gu, Sang Kee LEE, Young Bin Kim, Shin-Woo Nam | 2022-02-08 |
| 11195705 | Plasma generating unit and substrate treating apparatus comprising the same | Ogsen Galstyan, Junghwan Lee, Shin-Woo Nam | 2021-12-07 |
| 10867775 | Apparatus and method for treating substrate | Jamyung Gu, Shin-Woo Nam, Saewon Na, Jun Ho Lee, Jungmo Gu | 2020-12-15 |
| 10753800 | Calibrator of an optical emission spectroscopy | Jeong-Il Mun, Hyung Joo Lee, Jong-Woo Sun, Ja Myung GU, Jae Woong Hwang | 2020-08-25 |
| 10600618 | Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus | Ogsen Galstyan, Young Bin Kim, Jamyung Gu | 2020-03-24 |
| 10319566 | Apparatus for supplying power and apparatus for treating substrate including the same | Harutyun Melikyan, Ogsen Galstyan, Junghwan Lee, Shin-Woo Nam | 2019-06-11 |