Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278088 | Plasma antenna and apparatus for generating plasma having the same | Il-Gyo Koo, Hyo Seong SEONG, Soojin Lee | 2025-04-15 |
| 11244847 | Substrate treating apparatus and substrate treating method | Jong Hwan An, Jamyung Gu, Sang Kee LEE, Young Bin Kim, Shin-Woo Nam | 2022-02-08 |
| 10319566 | Apparatus for supplying power and apparatus for treating substrate including the same | Ogsen Galstyan, Junghwan Lee, Jong Hwan An, Shin-Woo Nam | 2019-06-11 |