Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276684 | Method and apparatus for determining cable length for plasma processing equipment | Tae Hoon Jo, Ji-Hyun Kim, Ja Myung GU | 2025-04-15 |
| 12278088 | Plasma antenna and apparatus for generating plasma having the same | Il-Gyo Koo, Harutyun Melikyan, Soojin Lee | 2025-04-15 |
| 12125678 | Filter unit, substrate treating apparatus including the same, and substrate treating method | Ogsen Galstyan, Byeung Geon JEON, Jong Hwan An | 2024-10-22 |
| 10563919 | Method, system, and apparatus for controlling a temperature of a substrate in a plasma processing chamber | Jung Min Won, Ik Jin Choi, Shin-Woo Nam | 2020-02-18 |