Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276684 | Method and apparatus for determining cable length for plasma processing equipment | Tae Hoon Jo, Hyo Seong SEONG, Ji-Hyun Kim | 2025-04-15 |
| 12125682 | Substrate treating apparatus and substrate treating method | Shant ARAKELYAN | 2024-10-22 |
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Goon Ho Park, Jung Mo Gu, Hyun Jin Kim | 2024-09-10 |
| 12051565 | Substrate treating apparatus and impedance matching method | Young Kuk Kim, Tae Hoon Jo, Goon Ho Park | 2024-07-30 |
| 11869749 | Substrate processing apparatus and method of manufacturing thereof | Shant ARAKELYAN, Jong Hwan An | 2024-01-09 |
| 11437220 | Plasma processing apparatus and method of operating the same | Shant Arakel Yan, Jung Mo Gu, Tae Hoon Jo | 2022-09-06 |
| 10753800 | Calibrator of an optical emission spectroscopy | Jeong-Il Mun, Hyung Joo Lee, Jong-Woo Sun, Jae Woong Hwang, Jong Hwan An | 2020-08-25 |