Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Goon Ho Park, Ja Myung GU, Hyun Jin Kim | 2024-09-10 |
| 11437220 | Plasma processing apparatus and method of operating the same | Ja Myung GU, Shant Arakel Yan, Tae Hoon Jo | 2022-09-06 |