Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087547 | Device for multi-level pulsing, substrate processing apparatus including the same | Jung Mo Gu, Ja Myung GU, Hyun Jin Kim | 2024-09-10 |
| 12051565 | Substrate treating apparatus and impedance matching method | Young Kuk Kim, Tae Hoon Jo, Ja Myung GU | 2024-07-30 |
| 11823874 | Substrate treating apparatus and method for controlling temperature of ferrite core | Ogsen Galstyan, Junpyo Lee, Hyun Jin Kim, Young Bin Kim, Jong Hwan An | 2023-11-21 |
| 11587770 | Apparatus and method for treating substrate | Jamyung Gu, Jong Hwan An, Taehoon Jo, Shant ARAKELYAN | 2023-02-21 |