Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249491 | Substrate treating apparatus and substrate support unit | Hyoungkyu Son, Jong Hwan An, Jae Hyun Cho, Min Keun Bae, Dong Suk Kim +3 more | 2025-03-11 |
| 12125678 | Filter unit, substrate treating apparatus including the same, and substrate treating method | Hyo Seong SEONG, Byeung Geon JEON, Jong Hwan An | 2024-10-22 |
| 11823874 | Substrate treating apparatus and method for controlling temperature of ferrite core | Junpyo Lee, Goon Ho Park, Hyun Jin Kim, Young Bin Kim, Jong Hwan An | 2023-11-21 |
| 11195705 | Plasma generating unit and substrate treating apparatus comprising the same | Junghwan Lee, Jong Hwan An, Shin-Woo Nam | 2021-12-07 |
| 10600618 | Plasma generation apparatus, substrate treating apparatus including the same, and control method for the plasma generation apparatus | Young Bin Kim, Jamyung Gu, Jong Hwan An | 2020-03-24 |
| 10319566 | Apparatus for supplying power and apparatus for treating substrate including the same | Harutyun Melikyan, Junghwan Lee, Jong Hwan An, Shin-Woo Nam | 2019-06-11 |