Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354852 | Electrostatic chuck, substrate processing apparatus, and substrate processing method | Hyun Ko | 2025-07-08 |
| 11705357 | Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck | Dong-Mok Lee | 2023-07-18 |
| 11367646 | Electrostatic chuck and electrostatic chuck apparatus including the same | Yoshiaki Moriya | 2022-06-21 |
| 11244847 | Substrate treating apparatus and substrate treating method | Harutyun Melikyan, Jong Hwan An, Jamyung Gu, Young Bin Kim, Shin-Woo Nam | 2022-02-08 |
| 11056320 | Substrate treating apparatus, substrate support unit, and substrate treating method | Kang Rae Ha | 2021-07-06 |
| 11056367 | Buffer unit, and apparatus for treating substrate with the unit | Dukhyun Son | 2021-07-06 |
| 11011405 | Apparatus for supporting substrate having gas supply hole and method of manufacturing same | Jae Kyung Lee | 2021-05-18 |
| 9704989 | Semiconductor device and method for manufacturing the same | Jong Hwan Kim | 2017-07-11 |
| 9406766 | Semiconductor device and method for manufacturing the same | Jong Hwan Kim | 2016-08-02 |
| 9252216 | Semiconductor device and method for manufacturing the same | Jong Hwan Kim | 2016-02-02 |
| 8853032 | Semiconductor device and method for manufacturing the same | Jong Hwan Kim | 2014-10-07 |