Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139195 | Lift pin unit and substrate supporting unit having the same | Hyung Joon Kim | 2021-10-05 |
| 11056320 | Substrate treating apparatus, substrate support unit, and substrate treating method | Sang Kee LEE | 2021-07-06 |
| 9909197 | Supporting unit and substrate treating apparatus including the same | Wonhaeng Lee | 2018-03-06 |