Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266512 | Plasma processing apparatus | Jaewon Shin, Hyungjoon Kim | 2025-04-01 |
| 12148641 | Container and substrate treating apparatus | Byung Kyu Kim | 2024-11-19 |
| 12087560 | Apparatus and method for treating substrate | Byung Kyu Kim | 2024-09-10 |
| 11756817 | Apparatus and method for processing substrate | Sunghwan Hong | 2023-09-12 |
| 11699599 | Substrate transfer apparatus and substrate treating apparatus | Byung Kyu Kim | 2023-07-11 |
| 11569110 | Buffer unit, and apparatus and method for treating substrate with the unit | — | 2023-01-31 |
| 11295936 | Apparatus and method for treating substrate | Byung Kyu Kim | 2022-04-05 |
| 11056367 | Buffer unit, and apparatus for treating substrate with the unit | Sang Kee LEE | 2021-07-06 |
| 9715996 | Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatus | — | 2017-07-25 |