Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545340 | Apparatus for monitoring pulsed high-frequency power and substrate processing apparatus including the same | Jong Hwan An, Shin-Woo Nam, Hong Won Lee | 2023-01-03 |
| 11322336 | Apparatus and method for treating substrate | Youngjae LIM | 2022-05-03 |