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Semiconductor device and method of fabricating the same |
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Method of manufacturing integrated circuit device |
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2023-10-03 |
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Integrated circuit device |
Hong-sik Shin, Heung-Sik Park, In-Keun Lee, Seung-ho Chae, Ha Young Choi |
2022-05-10 |
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Integrated circuit device |
Hong-sik Shin, Heung-Sik Park, In-Keun Lee, Seung-ho Chae, Ha Young Choi |
2020-12-29 |
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Semiconductor device |
Soo Yeon Jeong, Myeong-Cheol Kim, Do-Hyoung Kim, Nam-Myun Cho, In Ho Kim |
2016-07-26 |
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Method of forming patterns of semiconductor device |
Il-Sup Kim, Do-Hyoung Kim, Woo Cheol LEE, Hyun Ho Jung |
2016-03-22 |
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Methods of manufacturing a semiconductor device |
Soo Yeon Jeong, Myeong-Cheol Kim, Do-Hyoung Kim, Nam-Myun Cho, In Ho Kim |
2014-12-02 |
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Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support |
Ha Na Kim, Yong Jin Kim |
2013-05-28 |
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Method of manufacturing semiconductor device |
Tokashiki Ken, Chul-Ho Shin, Sang-Kuk Kim, Dong-Seok Lee |
2012-11-27 |
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Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support |
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2012-01-03 |
| 7919142 |
Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same |
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2011-04-05 |
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Methods of manufacturing non-volatile memory devices having insulating layers treated using neutral beam irradiation |
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2010-12-28 |
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Apparatus and method for controlling ion beam |
Sung-Wook Hwang, Chul-Ho Shin, Jong-Woo Sun |
2009-12-08 |
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Ion beam apparatus having plasma sheath controller |
Sung-Wook Hwang, Chul-Ho Shin |
2009-07-21 |
| 7094702 |
Layer-by-layer etching apparatus using neutral beam and method of etching using the same |
Geun-Young Yeom, Min-jae Chung, Sung Min Cho, Sae-hoon Chung |
2006-08-22 |
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Neutral beam source having electromagnet used for etching semiconductor device |
Geun-Young Yeom, Byoung Jac Park |
2006-06-13 |
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3-grid neutral beam source used for etching semiconductor device |
Geun-Young Yeom, Byoung Jae Park |
2005-08-23 |
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Etching apparatus using neutral beam |
Geun-Young Yeom, Min-jae Chung |
2005-08-09 |
| 6874443 |
Layer-by-layer etching apparatus using neutral beam and etching method using the same |
Geun-Young Yeom, Min-jae Chung, Sung Min Cho, Sae-hoon Chung |
2005-04-05 |
