Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848364 | Semiconductor device and method of fabricating the same | Won Hyuk Lee, Jong-Chul Park, Sang Duk Park, Hong-sik Shin | 2023-12-19 |
| 11776962 | Method of manufacturing integrated circuit device | Hong-sik Shin, Heung-Sik Park, In-Keun Lee, Seung-ho Chae, Ha Young Choi | 2023-10-03 |
| 11329044 | Integrated circuit device | Hong-sik Shin, Heung-Sik Park, In-Keun Lee, Seung-ho Chae, Ha Young Choi | 2022-05-10 |
| 10879244 | Integrated circuit device | Hong-sik Shin, Heung-Sik Park, In-Keun Lee, Seung-ho Chae, Ha Young Choi | 2020-12-29 |
| 9401359 | Semiconductor device | Soo Yeon Jeong, Myeong-Cheol Kim, Do-Hyoung Kim, Nam-Myun Cho, In Ho Kim | 2016-07-26 |
| 9293343 | Method of forming patterns of semiconductor device | Il-Sup Kim, Do-Hyoung Kim, Woo Cheol LEE, Hyun Ho Jung | 2016-03-22 |
| 8900944 | Methods of manufacturing a semiconductor device | Soo Yeon Jeong, Myeong-Cheol Kim, Do-Hyoung Kim, Nam-Myun Cho, In Ho Kim | 2014-12-02 |
| 8450680 | Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support | Ha Na Kim, Yong Jin Kim | 2013-05-28 |
| 8318412 | Method of manufacturing semiconductor device | Tokashiki Ken, Chul-Ho Shin, Sang-Kuk Kim, Dong-Seok Lee | 2012-11-27 |
| 8089042 | Apparatus and method for processing substrate using neutralized beams including applying a voltage to a substrate support | Ha Na Kim, Yong Jin Kim | 2012-01-03 |
| 7919142 | Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same | Geun-Young Yeom, Byoung Jae Park, Kyeong-Joon Ahn | 2011-04-05 |
| 7858464 | Methods of manufacturing non-volatile memory devices having insulating layers treated using neutral beam irradiation | Soo Doo Chae, Chung-woo Kim, Choong-Man Lee, Yung-Hee Yvette Lee, Chan-Jin Park +3 more | 2010-12-28 |
| 7629589 | Apparatus and method for controlling ion beam | Sung-Wook Hwang, Chul-Ho Shin, Jong-Woo Sun | 2009-12-08 |
| 7564042 | Ion beam apparatus having plasma sheath controller | Sung-Wook Hwang, Chul-Ho Shin | 2009-07-21 |
| 7094702 | Layer-by-layer etching apparatus using neutral beam and method of etching using the same | Geun-Young Yeom, Min-jae Chung, Sung Min Cho, Sae-hoon Chung | 2006-08-22 |
| 7060931 | Neutral beam source having electromagnet used for etching semiconductor device | Geun-Young Yeom, Byoung Jac Park | 2006-06-13 |
| 6933495 | 3-grid neutral beam source used for etching semiconductor device | Geun-Young Yeom, Byoung Jae Park | 2005-08-23 |
| 6926799 | Etching apparatus using neutral beam | Geun-Young Yeom, Min-jae Chung | 2005-08-09 |
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Geun-Young Yeom, Min-jae Chung, Sung Min Cho, Sae-hoon Chung | 2005-04-05 |