Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7060931 | Neutral beam source having electromagnet used for etching semiconductor device | Geun-Young Yeom, Do-Haing Lee | 2006-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7060931 | Neutral beam source having electromagnet used for etching semiconductor device | Geun-Young Yeom, Do-Haing Lee | 2006-06-13 |