Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148626 | Dry etching method using potential control of grid and substrate | Doo San KIM, Yun Jong JANG, Ye Eun KIM, You Jung GILL, Ki Hyun Kim +2 more | 2024-11-19 |
| 11424375 | Photoelectronic device, photodiode, and phototransistor | Ki Seok Kim, Ki Hyun Kim, You Jin JI, Ji Young Byun | 2022-08-23 |
| 11127570 | Plasma source and plasma generation apparatus using the same | Ki Hyun Kim, Ki Seok Kim, You Jin JI, Jin-Woo Park, Doo San KIM +5 more | 2021-09-21 |
| 11120975 | Ion beam etching apparatus | Jin-Woo Park, Doo San KIM, Jong Sik Oh, Da In SUNG, You Jin JI +6 more | 2021-09-14 |
| 10916670 | Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film | Ki Seok Kim, Ki Hyun Kim, Jin-Woo Park, Doo San KIM, You Jin JI +2 more | 2021-02-09 |
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Kyung Chae Yang, Hyun Woo TAK, Ye Ji SHIN, Da In SUNG | 2020-09-22 |
| 10593819 | Semiconductor device, photoelectronic device, and method for manufacturing transition-metal dichalcogenide thin film | Ki Seok Kim, Ki Hyun Kim, Jin-Woo Park, Doo San KIM, You Jin JI +1 more | 2020-03-17 |
| 9245752 | Method for etching atomic layer of graphene | Woong LIM, Kyung Seok MIN, Yi Yeon Kim, Jong Sik Oh | 2016-01-26 |
| 8974630 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Young-Joon Lee, Kyong-Nam Kim | 2015-03-10 |
| 8293069 | Inductively coupled plasma apparatus | Kyong-Nam Kim, Seung-Jae Jung | 2012-10-23 |
| 7919142 | Atomic layer deposition apparatus using neutral beam and method of depositing atomic layer using the same | Do-Haing Lee, Byoung Jae Park, Kyeong-Joon Ahn | 2011-04-05 |
| 7842159 | Inductively coupled plasma processing apparatus for very large area using dual frequency | Kyong-Nam Kim | 2010-11-30 |
| 7799706 | Neutral beam-assisted atomic layer chemical vapor deposition apparatus and method of processing substrate using the same | Byoung Jae Park, Sung Woo Kim, Jong Tae LIM | 2010-09-21 |
| 7777178 | Plasma generating apparatus and method using neutral beam | Sang Duk Park, Chang-Kwon Oh | 2010-08-17 |
| 7397099 | Method of forming nano-sized MTJ cell without contact hole | Soon-won Hwang, I-hun Song, Seok-jae Chung | 2008-07-08 |
| 7338577 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Young-Joon Lee, Kyong-Nam Kim | 2008-03-04 |
| 7220601 | Method of forming nano-sized MTJ cell without contact hole | Soon-won Hwang, I-hun Song, Seok-jae Chung | 2007-05-22 |
| 7094702 | Layer-by-layer etching apparatus using neutral beam and method of etching using the same | Min-jae Chung, Do-Haing Lee, Sung Min Cho, Sae-hoon Chung | 2006-08-22 |
| 7060931 | Neutral beam source having electromagnet used for etching semiconductor device | Do-Haing Lee, Byoung Jac Park | 2006-06-13 |
| 7012012 | Method of etching substrates | Myung Cheol Yoo, Wolfram Urbanek, Youn Joon Sung, Chang-hyun Jeong, Kyong-Nam Kim +1 more | 2006-03-14 |
| 6933495 | 3-grid neutral beam source used for etching semiconductor device | Do-Haing Lee, Byoung Jae Park | 2005-08-23 |
| 6926799 | Etching apparatus using neutral beam | Do-Haing Lee, Min-jae Chung | 2005-08-09 |
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Min-jae Chung, Do-Haing Lee, Sung Min Cho, Sae-hoon Chung | 2005-04-05 |
| 6818532 | Method of etching substrates | Myung Cheol Yoo, Wolfram Urbanek, Youn Joon Sung, Chang-hyun Jeong, Kyong-Nam Kim +1 more | 2004-11-16 |
| 6685523 | Method of fabricating capillary discharge plasma display panel using lift-off process | Steven Kim, Young-Joon Lee | 2004-02-03 |