Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094702 | Layer-by-layer etching apparatus using neutral beam and method of etching using the same | Geun-Young Yeom, Min-jae Chung, Do-Haing Lee, Sung Min Cho | 2006-08-22 |
| 6874443 | Layer-by-layer etching apparatus using neutral beam and etching method using the same | Geun-Young Yeom, Min-jae Chung, Do-Haing Lee, Sung Min Cho | 2005-04-05 |