Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127570 | Plasma source and plasma generation apparatus using the same | Geun-Young Yeom, Ki Hyun Kim, Ki Seok Kim, You Jin JI, Jin-Woo Park +5 more | 2021-09-21 |
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Geun-Young Yeom, Kyung Chae Yang, Ye Ji SHIN, Da In SUNG | 2020-09-22 |