Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11120975 | Ion beam etching apparatus | Geun-Young Yeom, Jin-Woo Park, Doo San KIM, Jong Sik Oh, Da In SUNG +6 more | 2021-09-14 |
| 10784082 | Apparatus for generating plasma and apparatus for treating substrate having the same | Geun-Young Yeom, Hyun Woo TAK, Ye Ji SHIN, Da In SUNG | 2020-09-22 |