Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8974630 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Geun-Young Yeom, Young-Joon Lee | 2015-03-10 |
| 8293069 | Inductively coupled plasma apparatus | Geun-Young Yeom, Seung-Jae Jung | 2012-10-23 |
| 7842159 | Inductively coupled plasma processing apparatus for very large area using dual frequency | Geun-Young Yeom | 2010-11-30 |
| 7338577 | Inductively coupled plasma processing apparatus having internal linear antenna for large area processing | Geun-Young Yeom, Young-Joon Lee | 2008-03-04 |
| 7012012 | Method of etching substrates | Geun-Young Yeom, Myung Cheol Yoo, Wolfram Urbanek, Youn Joon Sung, Chang-hyun Jeong +1 more | 2006-03-14 |
| 6818532 | Method of etching substrates | Geun-Young Yeom, Myung Cheol Yoo, Wolfram Urbanek, Youn Joon Sung, Chang-hyun Jeong +1 more | 2004-11-16 |