Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Bongseong KIM, Juho Lee +1 more | 2025-06-10 |
| 10971343 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn +1 more | 2021-04-06 |
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Je-Hun WOO, Bongseong KIM, Juho Lee +1 more | 2021-04-06 |
| 10903053 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim +1 more | 2021-01-26 |
| 10896838 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Dougyong Sung | 2021-01-19 |
| 10861724 | Substrate inspection apparatus and substrate processing system including the same | Jongwoo Sun, Hakyoung Kim, Wonyoung Jee | 2020-12-08 |
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Dougyong Sung, Suho LEE | 2020-12-01 |
| 10566221 | Apparatus for transferring substrate and apparatus for processing substrate including the same | Hyun Sun Choi, Taekyun Kang | 2020-02-18 |
| 10522374 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Dougyong Sung, Suho LEE | 2019-12-31 |
| 10481005 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Se Jin Oh, Tae-Kyun Kang, Yu Sin Kim, Jae Ik KIM, Chan-Bin Mo +3 more | 2019-11-19 |
| 10395900 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim +1 more | 2019-08-27 |
| 10229818 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn +1 more | 2019-03-12 |
| 10224228 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Dougyong Sung | 2019-03-05 |
| 10103043 | Apparatus for transferring substrate and apparatus for processing substrate including the same | Hyun Sun Choi, Taekyun Kang | 2018-10-16 |
| 7285788 | Ion beam extractor | Yung-Hee Yvette Lee, Jin Seok Lee | 2007-10-23 |
| 7282702 | Ion neutralizer | Jung Wook Kim | 2007-10-16 |