Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2021-04-06 |
| 9691618 | Methods of fabricating semiconductor devices including performing an atomic layer etching process | Dougyong Sung, Sejin OH, Hyunju Lee, Seungkyu LIM, Kiho Hwang | 2017-06-27 |
| 9490107 | Plasma apparatus and method of fabricating semiconductor device using the same | Moojin Kim, Bongseong KIM, DeogJa Koo, Unjoo Lee | 2016-11-08 |