Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dougyong Sung, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Kyungsik Kang, Jeong Gil Kim, Jinyong Kim, Hochul Kim, Yozo Matsuda +4 more | 2023-06-13 |
| 10971333 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dougyong Sung, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2021-04-06 |