Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Seongchul Hong, Kyungbin Park, Motoshi Sakai, Seungkoo Lee +1 more | 2023-11-28 |
| 11778719 | Laser beam delivery apparatus for extreme ultra violet light source | Dohyung Kim, Seongchul Hong, Insung Kim, Motoshi Sakai, Seulgi LEE +1 more | 2023-10-03 |
| 11676263 | Extreme ultraviolet (EUV) collector inspection apparatus and method | Dong-Hyub Lee, Jeong Gil Kim, Jinyong Kim, Hochul Kim, Yozo Matsuda +4 more | 2023-06-13 |