Patents per Year
Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072004 | Linear actuator | — | 2024-08-27 |
| 11828952 | Light source and extreme ultraviolet light source system using the same | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Kyungbin Park, Seungkoo Lee +1 more | 2023-11-28 |
| 11778719 | Laser beam delivery apparatus for extreme ultra violet light source | Dohyung Kim, Seongchul Hong, Kyungsik Kang, Insung Kim, Seulgi LEE +1 more | 2023-10-03 |
| 11384821 | Ball screw device | Kanta SATO, Yasuaki Abe, Kazuya Yamada | 2022-07-12 |
| 6621567 | Surface inspecting method and surface inspecting device | Kazumi Haga, Zenta Ushiyama | 2003-09-16 |
| 6356399 | Light projecting method, surface inspection method, and apparatus used to implement these methods | Kazumi Haga, Zenta Ushiyama | 2002-03-12 |
| 6317204 | Surface inspecting device and surface inspecting method | Kazumi Haga, Yoshihiro Ishiguro | 2001-11-13 |
| 5757479 | Optical inspection apparatus | Kazumi Haga, Satoshi Akiyama | 1998-05-26 |
| 5737074 | Surface inspection method and apparatus | Kazumi Haga | 1998-04-07 |