Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362216 | Plasma processing apparatus and semiconductor fabrication method using the same | Daehyun Lee, Youngil KANG, Youngeun Kim, Jaesuk KIM, Minji Park +4 more | 2025-07-15 |
| 11984344 | Lift apparatus and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Wooram Kim, Eungsu Kim, Heewon Min +4 more | 2024-05-14 |
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Byeongsang Kim, Keonwoo KIM, Eungsu Kim, Hakyoung Kim, Heewon Min +4 more | 2022-08-02 |
| 10854485 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dougyong Sung, Suho LEE, Yun-Kwang Jeon | 2020-12-01 |
| 10522374 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dougyong Sung, Suho LEE, Yun-Kwang Jeon | 2019-12-31 |