Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Donghyeon Na, Naohiko Okunishi +3 more | 2025-02-11 |
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Dougyong Sung, Sungjin Kim, Yunhwan Kim, Inseok Seo, Seungbo Shim +2 more | 2025-01-28 |
| 11984344 | Lift apparatus and substrate processing apparatus including the same | Keonwoo KIM, Wooram Kim, Eungsu Kim, Heewon Min, Sangwook Park +4 more | 2024-05-14 |
| 11538701 | Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the same | Taehyoung Lee, Sung Chai Kim, Wooram Kim, Kyungwon Yun, Keonho Lee +2 more | 2022-12-27 |
| 11404252 | Electrostatic chuck and substrate processing apparatus including the same | Keonwoo KIM, Eungsu Kim, Hakyoung Kim, Heewon Min, Kyeongtea Bang +4 more | 2022-08-02 |
| 9381653 | Robot and substrate handling apparatus including the same | Kang Min Park, Jungjun Park, JaeChul Hwang | 2016-07-05 |