Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10040192 | Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method | Seok-Won Heo, Sun Ho Kim, Chaemook Lim | 2018-08-07 |
| 9381653 | Robot and substrate handling apparatus including the same | Byeongsang Kim, Kang Min Park, Jungjun Park | 2016-07-05 |