Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764087 | Process apparatus including a non-contact thermo-sensor | Yeongrack Son, Ohhyuk Kwon, Dongouk Kim, Youngbum Kim, Woohee Kim +2 more | 2023-09-19 |
| 10040192 | Substrate transfer unit, substrate treating apparatus including the same, and substrate treating method | Seok-Won Heo, Sun Ho Kim, JaeChul Hwang | 2018-08-07 |