Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362216 | Plasma processing apparatus and semiconductor fabrication method using the same | Daehyun Lee, Youngil KANG, Youngeun Kim, Minji Park, Sangwook Park +4 more | 2025-07-15 |