Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362216 | Plasma processing apparatus and semiconductor fabrication method using the same | Daehyun Lee, Youngeun Kim, Jaesuk KIM, Minji Park, Sangwook Park +4 more | 2025-07-15 |
| 10119861 | Lamellar grating interferometer having stress-dispersible support structure | Jaehwan LEE, Jongmin Lee, Incheol Kim, Dohyun Park | 2018-11-06 |