Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605567 | Method of monitoring a semiconductor device fabrication process and method of fabricating a semiconductor device using the same | Jitae Park, Youngjoo Lee, Doo Young Gwak, Aekyung Kim, Hyowon Bae +3 more | 2023-03-14 |
| 10566221 | Apparatus for transferring substrate and apparatus for processing substrate including the same | Hyun Sun Choi, Yun-Kwang Jeon | 2020-02-18 |
| 10312059 | Ring member with air holes and substrate processing system including the same | Chulkyun Seok, JungHwan Um, Changwon Choi | 2019-06-04 |
| 10103043 | Apparatus for transferring substrate and apparatus for processing substrate including the same | Hyun Sun Choi, Yun-Kwang Jeon | 2018-10-16 |
| 9384803 | Storage device and latch management method thereof | Sang Soo Park, Moosung Kim | 2016-07-05 |