Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10892142 | System for fabricating a semiconductor device | SangJean Jeon, Jinyoung Park, Chanhoon Park, Hoyong Park, Jin-young Bang +2 more | 2021-01-12 |
| 10672629 | Ring assembly and chuck assembly having the same | Sunghyup Kim, Dong Wook Kim, Sungmoon Park, Taeseok Oh | 2020-06-02 |
| 10312059 | Ring member with air holes and substrate processing system including the same | Chulkyun Seok, Taekyun Kang, Changwon Choi | 2019-06-04 |