| 12298676 |
Substrate processing apparatus |
Injae Lee, Sungyong Bae, Daegeun YOON, Inho Choi, Euishin Kim +6 more |
2025-05-13 |
| 12170233 |
Plasma treatment apparatus, a method of monitoring a process of manufacturing a semiconductor device by using the same, and a method of manufacturing a semiconductor device including the monitoring method |
Meehyun Lim, Sung Yeol Kim, Hyung-Jung Yong, Hosun Yoo |
2024-12-17 |
| 11852984 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Ho YU, Jeonggil Kim, Minseok Choi |
2023-12-26 |
| 11848301 |
Method of manufacturing a semiconductor package |
Jonggu LEE, Byungjo KIM, Sanghoon Lee, Sukwon Lee, Sebin Choi |
2023-12-19 |
| 11837573 |
Chip bonding apparatus and method of manufacturing semiconductor device using the apparatus |
Junhyung Kim, Joongha Lee, Sangha Park, Kyeongbin Lim |
2023-12-05 |
| 11720027 |
Apparatus for generating extreme ultraviolet light and lithography apparatus including the same |
Injae Lee, Ohkug Kwon, Yongchan Kim, Ouiserg Kim, Jeonggil Kim +4 more |
2023-08-08 |
| 11711883 |
Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same |
Minseok Choi, Injae Lee, Inho Choi, Sungyeol Kim, Jeonggil Kim +1 more |
2023-07-25 |
| 11698590 |
Collector mirror and apparatus for creating extreme ultraviolet light including the same |
Hoseok Song, Injae Lee, Jeonggil Kim |
2023-07-11 |
| 11626381 |
Bonding head including a thermal compensator, die bonding apparatus including the same and method of manufacturing semiconductor package using the same |
Jonggu LEE, Byungjo KIM, Sanghoon Lee, Sukwon Lee, Sebin Choi |
2023-04-11 |
| 11607741 |
Semiconductor chip bonding apparatus including head having thermally conductive materials |
Sebin Choi, Sukwon Lee, Jonggu LEE |
2023-03-21 |
| 11599031 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Ho YU, Jeonggil Kim, Minseok Choi |
2023-03-07 |
| 11538697 |
Substrate processing apparatus |
Sang Ki Nam, Jang-Yeob Lee, Sungyeol Kim, Soonam Park, Siqing Lu |
2022-12-27 |
| 11454882 |
Pellicle for reflective mask |
Jinhwan Lee, Jeonggil Kim |
2022-09-27 |
| 11415891 |
Extreme ultraviolet light source system |
Myeongjun Gil, Yebin Nam, Injae Lee |
2022-08-16 |
| 11304287 |
Extreme ultraviolet light source systems |
Myeongjun Gil, Yebin Nam, Sanghoon Lee, Injae Lee |
2022-04-12 |
| 11231656 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Ho YU, Jeonggil Kim, Minseok Choi |
2022-01-25 |
| 10672629 |
Ring assembly and chuck assembly having the same |
Dong Wook Kim, Sungmoon Park, JungHwan Um, Taeseok Oh |
2020-06-02 |
| 10411062 |
Substrate bonding apparatus having adsorption sectors with different vacuum pressures and method of manufacturing semiconductor device using the same |
Jun-Hyung Kim, Seokho Kim, Jaegeun Kim, Taeyeong Kim |
2019-09-10 |
