Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852984 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2023-12-26 |
| 11599031 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2023-03-07 |
| 11497109 | EUV light concentrating apparatus and lithography apparatus including the same | Chae Mook LIM, Sung Ho JANG, Min Seok Choi | 2022-11-08 |
| 11231656 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2022-01-25 |
| 11048179 | Apparatus for removing residues from source vessel | Jinhwan Lee, Minseok Choi, Jeonggil Kim, Jongbin Park, Inho Choi | 2021-06-29 |
| 10946577 | Imprinting apparatus | Byeong Sang KIM, Jung Wook Kim, Kyung PARK, Ki Ju Sohn, Eun Soo Hwang | 2021-03-16 |
| 10942447 | Film frame, display substrate-manufacturing system, and display substrate-manufacturing method | Dong Wook Kim, Ju Hyun Lee, Byeong Sang KIM, Kyung PARK, Ki Ju Sohn | 2021-03-09 |
| 10647107 | Ultraviolet curing apparatus | Dong Wook Kim, Byeong Sang KIM, Kyung PARK, Ki Ju Sohn, Ju Hyun Lee | 2020-05-12 |
| 5371541 | Phase-converting circuit for superimpose control | — | 1994-12-06 |