| 11852984 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Sunghyup Kim, Jeonggil Kim, Minseok Choi |
2023-12-26 |
| 11599031 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Sunghyup Kim, Jeonggil Kim, Minseok Choi |
2023-03-07 |
| 11497109 |
EUV light concentrating apparatus and lithography apparatus including the same |
Chae Mook LIM, Sung Ho JANG, Min Seok Choi |
2022-11-08 |
| 11231656 |
Target debris collection device and extreme ultraviolet light source apparatus including the same |
Sunghyup Kim, Jeonggil Kim, Minseok Choi |
2022-01-25 |
| 11048179 |
Apparatus for removing residues from source vessel |
Jinhwan Lee, Minseok Choi, Jeonggil Kim, Jongbin Park, Inho Choi |
2021-06-29 |
| 10946577 |
Imprinting apparatus |
Byeong Sang KIM, Jung Wook Kim, Kyung PARK, Ki Ju Sohn, Eun Soo Hwang |
2021-03-16 |
| 10942447 |
Film frame, display substrate-manufacturing system, and display substrate-manufacturing method |
Dong Wook Kim, Ju Hyun Lee, Byeong Sang KIM, Kyung PARK, Ki Ju Sohn |
2021-03-09 |
| 10647107 |
Ultraviolet curing apparatus |
Dong Wook Kim, Byeong Sang KIM, Kyung PARK, Ki Ju Sohn, Ju Hyun Lee |
2020-05-12 |
| 5371541 |
Phase-converting circuit for superimpose control |
— |
1994-12-06 |
