Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298671 | Illumination correction apparatus | Donghyeong Kim, Eunhee Jeang, Teun Boeren, Yoonsang Lee, Kyungbin Park | 2025-05-13 |
| 12298676 | Substrate processing apparatus | Injae Lee, Sungyong Bae, Daegeun YOON, Inho Choi, Sunghyup Kim +6 more | 2025-05-13 |
| 12016459 | Refrigerator | — | 2024-06-25 |
| 11852984 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Ho YU, Minseok Choi | 2023-12-26 |
| 11822260 | Apparatus for removing residue of EUV light source vessel | Jongbin Park, Minseok Choi, Inho Choi | 2023-11-21 |
| 11720027 | Apparatus for generating extreme ultraviolet light and lithography apparatus including the same | Injae Lee, Ohkug Kwon, Sunghyup Kim, Yongchan Kim, Ouiserg Kim +4 more | 2023-08-08 |
| 11711883 | Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same | Minseok Choi, Injae Lee, Inho Choi, Sungyeol Kim, Sunghyup Kim +1 more | 2023-07-25 |
| 11698590 | Collector mirror and apparatus for creating extreme ultraviolet light including the same | Hoseok Song, Sunghyup Kim, Injae Lee | 2023-07-11 |
| 11633041 | Refrigerator | — | 2023-04-25 |
| 11599031 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Ho YU, Minseok Choi | 2023-03-07 |
| 11486634 | Refrigerator | — | 2022-11-01 |
| 11454882 | Pellicle for reflective mask | Jinhwan Lee, Sunghyup Kim | 2022-09-27 |
| 11333432 | Refrigerator | — | 2022-05-17 |
| 11302901 | Electrode assembly and method of stabilizing secondary battery | JungSeok Choi, Song Taek Oh | 2022-04-12 |
| 11231656 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Ho YU, Minseok Choi | 2022-01-25 |
| 11073331 | Refrigerator | — | 2021-07-27 |
| 11048179 | Apparatus for removing residues from source vessel | Ho YU, Jinhwan Lee, Minseok Choi, Jongbin Park, Inho Choi | 2021-06-29 |
| 11033104 | Refrigerator | — | 2021-06-15 |
| 10598428 | Refrigerator | — | 2020-03-24 |