| 12298671 |
Illumination correction apparatus |
Donghyeong Kim, Teun Boeren, Yoonsang Lee, Jeonggil Kim, Kyungbin Park |
2025-05-13 |
| 12224214 |
Method of fabricating a semiconductor device |
Seongkeun Cho, Jihun Lee, Gyumin Jeong, Hyunjae Kang, Taemin Earmme |
2025-02-11 |
| 11996270 |
Wafer processing apparatus |
Seongkeun Cho, Kyungrim KIM, Incheol Song, Jangwon Cho |
2024-05-28 |
| 11955387 |
Method of fabricating a semiconductor device |
Seongkeun Cho, Jihun Lee, Gyumin Jeong, Hyunjae Kang, Taemin Earmme |
2024-04-09 |
| 11946809 |
Polarization measuring device and method of fabricating semiconductor device using the same |
Ingi Kim, Minhwan Seo, Sangwoo Bae, Akinori Okubo, Jungchul Lee |
2024-04-02 |
| 11823961 |
Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system |
BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Maksim Riabko, Anton Sergeevich MEDVEDEV +7 more |
2023-11-21 |
| 11715628 |
Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same |
Jeongil Mun, Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Seeyub Yang +2 more |
2023-08-01 |
