| 11862440 |
Semiconductor processing equipment including electrostatic chuck for plasma processing |
Jinyoung Park, Jongwoo Sun, Hyungjoo Lee |
2024-01-02 |
| 11715628 |
Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same |
Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Seeyub Yang, Yongseok Lee +2 more |
2023-08-01 |
| 11264291 |
Sensor device and etching apparatus having the same |
Seeyub Yang, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim, Jongwoo Sun |
2022-03-01 |
| 11215506 |
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method |
Kyeonghun Kim, Hyung Joo Lee, Jongwoo Sun |
2022-01-04 |
| 11092495 |
Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device |
Hyung Joo Lee, Jongwoo Sun |
2021-08-17 |
| 10935429 |
Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method |
Kyeonghun Kim, Hyung Joo Lee, Jongwoo Sun |
2021-03-02 |
