Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862440 | Semiconductor processing equipment including electrostatic chuck for plasma processing | Jinyoung Park, Jongwoo Sun, Hyungjoo Lee | 2024-01-02 |
| 11715628 | Method of forming plasma processing apparatus, related apparatus, and method of forming semiconductor device using the same | Kyeonghun Kim, Taekyoon PARK, Jongwoo Sun, Seeyub Yang, Yongseok Lee +2 more | 2023-08-01 |
| 11264291 | Sensor device and etching apparatus having the same | Seeyub Yang, Hyungjoo Lee, Kyoungsuk Kim, Kyeonghun Kim, Jongwoo Sun | 2022-03-01 |
| 11215506 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Hyung Joo Lee, Jongwoo Sun | 2022-01-04 |
| 11092495 | Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device | Hyung Joo Lee, Jongwoo Sun | 2021-08-17 |
| 10935429 | Substrate processing apparatus, substrate processing module, and semiconductor device fabrication method | Kyeonghun Kim, Hyung Joo Lee, Jongwoo Sun | 2021-03-02 |