Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339223 | Measuring apparatus and testing apparatus having the same | Yasuhiro Hidaka | 2025-06-24 |
| 12327579 | Inspection device | Shinji Ueyama, Harutaka Sekiya, Tomoki Onishi | 2025-06-10 |
| 11946809 | Polarization measuring device and method of fabricating semiconductor device using the same | Minhwan Seo, Sangwoo Bae, Akinori Okubo, Jungchul Lee, Eunhee Jeang | 2024-04-02 |
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | Eunhee Jeang, BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Maksim Riabko +7 more | 2023-11-21 |
| 11823927 | Wafer inspection apparatus and system including the same | Kyunghun Han, Sangwoo Bae, Jungchul Lee, Minhwan Seo, Myeongock Ko +3 more | 2023-11-21 |
| 11425833 | Electronic device including foldable conductive plate | Wooktae KIM, Gyuha Jo | 2022-08-23 |
| 10388537 | Cleaning apparatus, chemical mechanical polishing system including the same, cleaning method after chemical mechanical polishing, and method of manufacturing semiconductor device including the same | Chae Lyoung Kim, Tae Hong Kim, Jung-Min Oh, Yungjun Kim, Boun Yoon +2 more | 2019-08-20 |
| 10186427 | Substrate treating apparatus | Kyoung Hwan Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park, Jung-Min Oh +2 more | 2019-01-22 |
| 9852921 | Substrate treating apparatus and method of treating substrate | Kyoung Hwan Kim, Mihyun PARK, Young-Hoo Kim, Ui-soon Park, Jung-Min Oh +2 more | 2017-12-26 |