Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823961 | Substrate inspection system and method of manufacturing semiconductor device using substrate inspection system | Eunhee Jeang, BORIS AFINOGENOV, Sangwoo Bae, Wondon Joo, Anton Sergeevich MEDVEDEV +7 more | 2023-11-21 |
| 11789332 | Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennas | Alexander Sergeevich Shorokhov, Kirill Igorevich Okhlopkov, Alexandr Igorevich Musorin | 2023-10-17 |
| 10831082 | Apparatus and method for controlling laser light propagation direction by using a plurality of nano-antennas | Alexander Sergeevich Shorokhov, Kirill Igorevich Okhlopkov, Alexandr Igorevich Musorin | 2020-11-10 |
| 10816480 | Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same | Eun Hee Jeang, Aleksandr Sergeevich Shorokhov, Anton Sergeevich MEDVEDEV, Sang Woo BAE, Akinori Okubo +3 more | 2020-10-27 |
| 10296776 | Device and method for biometrics authentication | Alexey Dmitrievich Lantsov, Alexey Andreevich Shchekin, Anton Sergeevich MEDVEDEV, Sergey Nikolaevich Koptyaev | 2019-05-21 |
| 9995648 | Optical measurement system and method for measuring critical dimension of nanostructure | Alexey Andreevich Shchekin, Sergey Nikolaevich Koptyaev, Anton Sergeevich MEDVEDEV | 2018-06-12 |