Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315703 | Plasma processing apparatus and methods of manufacturing semiconductor device using the same | Kyoungchon Kim, Kwangnam Kim, Jongwoo Sun | 2025-05-27 |
| 12224214 | Method of fabricating a semiconductor device | Seongkeun Cho, Eunhee Jeang, Jihun Lee, Gyumin Jeong, Hyunjae Kang | 2025-02-11 |
| 12068140 | Method and system for monitoring substrate processing apparatus | Sejin OH, Eunwoo Lee, Jongwoo Sun | 2024-08-20 |
| 11984297 | Plasma control device and plasma processing system | Sejin OH, Youngdo Kim, Sanghun Kim, Sungyeol Kim, Younghwan Kim +2 more | 2024-05-14 |
| 11964357 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Byoungho Kwon, Kuntack Lee | 2024-04-23 |
| 11955387 | Method of fabricating a semiconductor device | Seongkeun Cho, Eunhee Jeang, Jihun Lee, Gyumin Jeong, Hyunjae Kang | 2024-04-09 |
| 11929239 | Plasma processing apparatus and semiconductor device manufacturing method using the same | Sejin OH, Iksu Byun, Jongwoo Sun, Jewoo Han | 2024-03-12 |
| 11605551 | Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device | Youngjae Son, Guesuk Lee, Hyeongyun Lee, Seungchul Han | 2023-03-14 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Yungjun Kim, Hyunjoon Park, Seungchul Han, Byoungho Kwon +1 more | 2023-02-28 |
| 11471996 | Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus | Seungchul Han, Yonghee Lee, Byoungho Kwon, Kuntack Lee | 2022-10-18 |
| 11027394 | Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same | Jieun Yang, Dong-il Yoon, Gui Hyun Cho, Seok Heo, Jong-Hwi Seo +1 more | 2021-06-08 |
| 10247189 | Scroll compressor with oldham ring having a plurality of keys coupled to an orbiting scroll and a fixed scroll | Byeongchul Lee, Cheolhwan Kim, Sanghun SEONG | 2019-04-02 |
| 9322273 | Scroll compressor with Oldham ring | Byeongchul Lee, Cheolhwan Kim, Sanghun SEONG | 2016-04-26 |
| 9109599 | Scroll compressor having oil hole | Jaesang Lee, Byeongchul Lee, Namkyu Cho | 2015-08-18 |