Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605551 | Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device | Youngjae Son, Taemin Earmme, Hyeongyun Lee, Seungchul Han | 2023-03-14 |
| 11462410 | Semiconductor manufacturing apparatus including a beam shaper for shaping a laser beam | Nohsung Kwak, Euijin Seo, Jonghwi Seo, Jaehee Lee, Ilyoung Han | 2022-10-04 |